| Equipment |
Vendor (Product) |
Accuracy (μm) |
Quantity |
| Ultrahigh Accurate 3-D Profilometer |
PANASONIC
(UA3P-300、3000、400T) |
0.01 |
8 |
| Coordinate measuring machine |
ZEISS、MITUTOYO |
0.28~1.7 |
4 |
| 3D Optical Profiler |
ZYGO
(Compass RT、NewView8000) |
0.1 |
2 |
| 2D Optical Profiler |
MITUTOYO (Hyper-QV) |
0.8 |
5 |
| High-Precision Roundness test device |
Taylor Hobson (TR585HS)
ACCRETECH |
0.1 |
2 |
| High-Precision centration test device |
TRIOPTICS |
0.1 |
2 |
| Optical micrometer |
KEYENCE |
0.1 |
5 |
| Optical micrometer |
MITUTOYO |
0.1 |
2 |
| Microscope |
NIKON (MM-400/L) |
1 |
6 |